Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249
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        Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249
                2010 | Technical
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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    | Published by | Materials Research Society | 
| Edition | Unknown | 
| ISBN | 9781605112268 | 
| Language | N/A | 
            
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