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2017 | Science & Mathematics
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
Nikolay Kazanskiy
(Author)
| Published by | Taylor & Francis Ltd |
| Edition | Unknown |
| ISBN | 9781138197282 |
| Language | N/A |
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